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MTL.03.12R 12inch Wafer Inspection Microscope
Description and Notes
MTL.03.12R 12inch Wafer Inspection Microscope
Specification
Name of Part Specification
MTL.03.12R
Head Trinocular Head, 0-35 °inclined, Erect Image,Interpupillary Distance 50~76mm,Split Ratio 0/100 or 100/0
Eyepiece High-Eyepoint Plan Eyepeiece PL10X/25mm,Diopter Adjustable
High-Eyepoint Plan Eyepeiece PL10X/25mm whit reticles,Diopter Adjustable
optional
BF/DF Objective BF/DF Infinity Semi-Aprochromatic Metallurgical Objective5X,WD=13.5,NA=0.15
BF/DF Infinity Semi-Aprochromatic Metallurgical Objective10X,WD=9,NA=0.30
BF/DF Infinity Semi-Aprochromatic Metallurgical Objective20X,WD=2.5,NA=0.50
optional
BF/DF Infinity Semi-Aprochromatic Metallurgical Objective20X,WD=8.5,NA=0.40
BF/DF Infinity Semi-Aprochromatic Metallurgical Objective50X,WD=1.0,NA=0.80
BF/DF Infinity Semi-Aprochromatic Metallurgical Objective100X,WD=1.0,NA=0.90
BF Objective BF Infinity Semi-Aprochromatic Metallurgical Objective5X,WD=19.5,NA=0.15
optional
BF Infinity Semi-Aprochromatic Metallurgical Objective10X,WD=10.9,NA=0.30
optional
BF Infinity Semi-Aprochromatic Metallurgical Objective20X,WD=3.2,NA=0.50
optional
BF Infinity Semi-Aprochromatic Metallurgical Objective50X,WD=1.2,NA=0.80
optional
BF Infinity Semi-Aprochromatic Metallurgical Objective100X,WD=1,NA=0.90
optional
Nosepiece BF/DF Motorized Sextuple Nosepiece, With DIC Slot
Working Stage 12X14inch Three Layers Woring stage, stage size: 420mmX718mm,Movement:305mmX356mm,with controller handle, can move quickly all range. Glass insert for transimitted light
Frame Body Reflected/Transmitted body, low-position coaxial coarse and fine adjustment, coarse adjustment distance: 35mm; fine precision:
0.001mm. With coarse adjustment stop and tightness adjustment.
Built-in 100-240V wide voltage transforme
Reflected Light BF/DF reflected illuminator with iris field diaphragm and aperture diaphragm, central adjustable. With filter slot and polarizing slot.
With Selector switch for Bright Field and Dark field Exchanging
Interface Filter interface filter Blue (for Reflected):≤480nm
optional
interface filter Green (for Reflected)::520nm-570nm
optional
interface filter Red (for Reflected)::630nm-750nm
optional
interface filter Natural (for Reflected):
Lamp 12V100W Tog light, Center fixed
12V/100W Halogen(PHILIPS 7724)
Polarizing Kits Polarizing Filter Slider For Reflect Light Source
Fixed Analysis Slider, For Reflect Light Source
CCD Adapter 0.5X CCD Adapter, Adjustable
optional
0.65X CCD Adapter, Adjustable
optional
1x CCD Adapter, Adjustable
optional

Note: Means Standard Parts; O means Optional Parts